Sanyu Co.,Ltd

TEL0294-72-2245
FAX0294-73-0459
Contact us

Products

Characteristics

・High spatial resolution achieved by our original SPPA actuators
・Desk-top size
・Optional units (stages) available

Configuration and specifications

One stage is included in the standard configuration
Additional stages are optional

Configuration and specifications

Unit configuration 1 to 4 units (NMS; Automatic stages)
Stage specifications Coarse adjustment (Motor)
X-axis +/-7.5 mm Y-axis +/-7.5 mm Z-axis +/-5 mm
Resolution 10 nm
Fine adjustment (Piezo)
X-, Y-, Z-axis +/-0.5 μm
Resolution:<1 nm

Applications

・ Multi prober for SEM

The system is optimized to users’ SEM system and applications such as probing, EBAC analysis.

  • Heating experiment of gallium
  • Exposing LSI metal lines

・ Multi prober for atmospheric environments

An optical microscope is implemented in the default system
The system is easily installed on your desktop

  • Heating experiment of gallium
  • Exposing LSI metal lines

・ Multi prober for Emission microscope

Capable of probing samples in a dark box

  • Heating experiment of gallium
  • Exposing LSI metal lines