Products
Characteristics
・High spatial resolution achieved by our original SPPA actuators
・Desk-top size
・Optional units (stages) available
Configuration and specifications
One stage is included in the standard configuration
Additional stages are optional
Configuration and specifications
| Unit configuration | 1 to 4 units (NMS; Automatic stages) |
|---|---|
| Stage specifications |
Coarse adjustment (Motor) X-axis +/-7.5 mm Y-axis +/-7.5 mm Z-axis +/-5 mm Resolution 10 nm Fine adjustment (Piezo) X-, Y-, Z-axis +/-0.5 μm Resolution:<1 nm |
Applications
・ Multi prober for SEM
The system is optimized to users’ SEM system and applications such as probing, EBAC analysis.
・ Multi prober for atmospheric environments
An optical microscope is implemented in the default system
The system is easily installed on your desktop
・ Multi prober for Emission microscope
Capable of probing samples in a dark box
